The Influence of Surface Structures on Sputtering: Angular Distribution and 
Yield from Faceted Surfaces

Littmark, U.; Hofer, W.O.

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The Influence of Surface Structures on Sputtering: Angular Distribution and Yield from Faceted Surfaces

Littmark, U., & Hofer, W. (1978). The Influence of Surface Structures on Sputtering: Angular Distribution and Yield from Faceted Surfaces. Journal of Material Science, 13, 2577-2586.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-BCFF-7 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-BD00-A

Genre: Journal Article

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Creators:
Littmark, U.¹, Author
Hofer, W.O.², Author

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1Max Planck Institute for Plasma Physics, ou_persistent27
2External Organizations, ou_persistent22

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Dates: Date issued: 1978

Publication Status: Issued

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Title: Journal of Material Science

Source Genre: Journal

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Pages: - Volume / Issue: 13 Sequence Number: - Start / End Page: 2577 - 2586 Identifier: -