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  Deceleration Ion Optical Systems for Sputtering Measurements between 50 eV as Function of Angle of Incidence

Liebl, H., Bohdansky, J., Roth, J., & Dose, V. (1987). Deceleration Ion Optical Systems for Sputtering Measurements between 50 eV as Function of Angle of Incidence. Review of Scientific Instruments, 58, 10, 1830-1832.

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 Creators:
Liebl, H.1, Author           
Bohdansky, J.1, Author           
Roth, J.1, Author           
Dose, V.1, 2, Author           
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              
2Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856284              

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 Dates: 1987
 Publication Status: Published in print
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Title: Review of Scientific Instruments
Source Genre: Journal
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Pages: - Volume / Issue: 58, 10 Sequence Number: - Start / End Page: 1830 - 1832 Identifier: -