Physikalische Grundlagen moderner Methoden der Oberflaechenanalyse

Taglauer, E.; Frey, H.; Heiland, W.; Kienel, K.

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Physikalische Grundlagen moderner Methoden der Oberflaechenanalyse

Taglauer, E., Frey, H., Heiland, W., & Kienel, K. (1987). Physikalische Grundlagen moderner Methoden der Oberflaechenanalyse. In Duennschichttechnologie (pp. 314-339).

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C007-5 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C008-3

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Creators:
Taglauer, E.¹, Author
Frey, H.², Author
Heiland, W.³, Author
Kienel, K.⁴, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2Max Planck Institute for Plasma Physics, ou_persistent27
3Experimental Plasma Physics 2 (E2), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856292
4External Organizations, ou_persistent22

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Dates: Date issued: 1987

Publication Status: Issued

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Title: Duennschichttechnologie

Source Genre: Book

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Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 314 - 339 Identifier: -