Surface Cleaning Using Sputtering

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Surface Cleaning Using Sputtering

Taglauer, E. (1990). Surface Cleaning Using Sputtering. Applied Physics A: Solids and Surfaces, A 51, 3, 238-251.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C4AA-A Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C4AB-8

Genre: Journal Article

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Creators:
Taglauer, Edmund¹, Author

Affiliations:
1External Organizations, ou_persistent22

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Dates: Date issued: 1990

Publication Status: Issued

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Title: Applied Physics A: Solids and Surfaces

Source Genre: Journal

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Pages: - Volume / Issue: A 51, 3 Sequence Number: - Start / End Page: 238 - 251 Identifier: -