Helium Implantation Effects in Hard Hydrogenated Carbon Layers

Boutard, D.; Gudowska, I.; Scherzer, B.M.U.; Moeller, W.

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Helium Implantation Effects in Hard Hydrogenated Carbon Layers

Boutard, D., Gudowska, I., Scherzer, B., & Moeller, W. (1990). Helium Implantation Effects in Hard Hydrogenated Carbon Layers. Journal of Applied Physics, 68, 5, 2068-2072.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C4B4-1 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C4B5-0

Genre: Journal Article

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Creators:
Boutard, D.¹, Author
Gudowska, I.¹, Author
Scherzer, B.M.U.¹, Author
Moeller, W.², Author

Affiliations:
1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Dates: Date issued: 1990

Publication Status: Issued

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Title: Journal of Applied Physics

Source Genre: Journal

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Pages: - Volume / Issue: 68, 5 Sequence Number: - Start / End Page: 2068 - 2072 Identifier: -