Elongated Microwave Electron Cyclotron Resonance Heating Plasma Source

Geisler, M.; Kieser, J.; Raeuchle, E.; Wilhelm, R.

Local TagsRelease HistoryDetailsSummary

Elongated Microwave Electron Cyclotron Resonance Heating Plasma Source

Geisler, M., Kieser, J., Raeuchle, E., & Wilhelm, R. (1990). Elongated Microwave Electron Cyclotron Resonance Heating Plasma Source. Journal of Vacuum Science and Technology, 8, 908-915.

Item is Released

show all hide all

Basic

show hide

Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C894-9 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C895-7

Genre: Journal Article

Files

show Files

Locators

show

Creators

show

hide

Creators:
Geisler, M.¹, Author
Kieser, J.¹, Author
Raeuchle, E.¹, Author
Wilhelm, R.², Author

Affiliations:
1External Organizations, ou_persistent22
2Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856318

Content

show

Details

show

hide

Language(s):

Dates: Date issued: 1990

Publication Status: Issued

Pages: -

Publishing info: -

Table of Contents: -

Rev. Type: -

Identifiers: -

Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show

hide

Title: Journal of Vacuum Science and Technology

Source Genre: Journal

Creator(s):

Affiliations:

Publ. Info: -

Pages: - Volume / Issue: 8 Sequence Number: - Start / End Page: 908 - 915 Identifier: -