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  Physical Sputtering

Eckstein, W., Bohdansky, J., & Roth, J. (1991). Physical Sputtering. Nuclear Fusion. Special Supplement 1, 51-61.

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 Creators:
Eckstein, W.1, Author              
Bohdansky, J.2, Author              
Roth, J.1, Author              
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              
2Max Planck Institute for Plasma Physics, ou_persistent27              

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 Dates: 1991
 Publication Status: Published in print
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Title: Nuclear Fusion. Special Supplement 1
Source Genre: Journal
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Publ. Info: -
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 51 - 61 Identifier: -