In Situ Plasma and Surface Diagnostics of C:H Deposition from ECR Plasmas

Koch, A.; Clausing, R.E.; Engelhard, M.; Horton, L.L.; Jacob, W.; Angus, J.C.; Moeller, W.; Koidl, P.; Wilhelm, R.

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In Situ Plasma and Surface Diagnostics of C:H Deposition from ECR Plasmas

Koch, A., Clausing, R., Engelhard, M., Horton, L., Jacob, W., Angus, J., et al. (1991). In Situ Plasma and Surface Diagnostics of C:H Deposition from ECR Plasmas. In Diamond and Diamond-Like Films and Coatings (pp. 281-288). Plenum Press.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C98E-F Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C98F-D

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Urheber:
Koch, A.¹, Autor
Clausing, R.E.¹, Autor
Engelhard, M.², Autor
Horton, L.L.¹, Autor
Jacob, W.³, Autor
Angus, J.C.¹, Autor
Moeller, W.³, Autor
Koidl, P.¹, Autor
Wilhelm, R.⁴, Autor

Affiliations:
1External Organizations, ou_persistent22
2Max Planck Institute for Plasma Physics, ou_persistent27
3Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
4Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856318