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  In Situ Plasma and Surface Diagnostics of C:H Deposition from ECR Plasmas

Koch, A., Clausing, R., Engelhard, M., Horton, L., Jacob, W., Angus, J., et al. (1991). In Situ Plasma and Surface Diagnostics of C:H Deposition from ECR Plasmas. In Diamond and Diamond-Like Films and Coatings (pp. 281-288). Plenum Press.

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 Creators:
Koch, A.1, Author
Clausing, R.E.1, Author
Engelhard, M.2, Author              
Horton, L.L.1, Author
Jacob, W.3, Author              
Angus, J.C.1, Author
Moeller, W.3, Author              
Koidl, P.1, Author
Wilhelm, R.4, Author              
Affiliations:
1External Organizations, ou_persistent22              
2Max Planck Institute for Plasma Physics, ou_persistent27              
3Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              
4Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856318              

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 Dates: 1991
 Publication Status: Published in print
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 Rev. Type: -
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Title: Diamond and Diamond-Like Films and Coatings
Source Genre: Book
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Publ. Info: Plenum Press
Pages: - Volume / Issue: 266 Sequence Number: - Start / End Page: 281 - 288 Identifier: -