In Situ Plasma and Surface Diagnostics of C:H Deposition from ECR Plasmas

Koch, A.; Clausing, R.E.; Engelhard, M.; Horton, L.L.; Jacob, W.; Angus, J.C.; Moeller, W.; Koidl, P.; Wilhelm, R.

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In Situ Plasma and Surface Diagnostics of C:H Deposition from ECR Plasmas

Koch, A., Clausing, R., Engelhard, M., Horton, L., Jacob, W., Angus, J., et al. (1991). In Situ Plasma and Surface Diagnostics of C:H Deposition from ECR Plasmas. In Diamond and Diamond-Like Films and Coatings (pp. 281-288). Plenum Press.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C98E-F Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C98F-D

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Creators:
Koch, A.¹, Author
Clausing, R.E.¹, Author
Engelhard, M.², Author
Horton, L.L.¹, Author
Jacob, W.³, Author
Angus, J.C.¹, Author
Moeller, W.³, Author
Koidl, P.¹, Author
Wilhelm, R.⁴, Author

Affiliations:
1External Organizations, ou_persistent22
2Max Planck Institute for Plasma Physics, ou_persistent27
3Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
4Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856318

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Dates: Date issued: 1991

Publication Status: Issued

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Title: Diamond and Diamond-Like Films and Coatings

Source Genre: Book

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Publ. Info: Plenum Press

Pages: - Volume / Issue: 266 Sequence Number: - Start / End Page: 281 - 288 Identifier: -