Dynamic Monte Carlo Simulation of Ion Beam and Plasma Techniques

Moeller, W.; Harper, J.M.E.; Miyake, K.; McNeil, J.R.; Gorbatkin, S.M.

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Dynamic Monte Carlo Simulation of Ion Beam and Plasma Techniques

Moeller, W., Harper, J., Miyake, K., McNeil, J., & Gorbatkin, S. (1991). Dynamic Monte Carlo Simulation of Ion Beam and Plasma Techniques. In Low Energy Ion Beam and Plasma Modification of Materials (pp. 3-8).

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C996-C Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C997-A

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Creators:
Moeller, W.¹, Author
Harper, J.M.E.², Author
Miyake, K.², Author
McNeil, J.R.², Author
Gorbatkin, S.M.², Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2External Organizations, ou_persistent22

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Dates: Date issued: 1991

Publication Status: Issued

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Title: Low Energy Ion Beam and Plasma Modification of Materials

Source Genre: Book

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Pages: - Volume / Issue: 223 Sequence Number: - Start / End Page: 3 - 8 Identifier: -