Limitations of Interface Sharpness in a-Si:H/a-SiC:H Multilayers

Schwarz, R.; Fischer, T.; Hanesch, P.; Muschik, T.; Kolodzey, J.; Cerva, H.; Meyerheim, H.L.; Scherzer, B.M.U.

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Limitations of Interface Sharpness in a-Si:H/a-SiC:H Multilayers

Schwarz, R., Fischer, T., Hanesch, P., Muschik, T., Kolodzey, J., Cerva, H., et al. (1991). Limitations of Interface Sharpness in a-Si:H/a-SiC:H Multilayers. Appl. Surf. Science, 50, 456-461.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-CA92-C Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-CA93-A

Genre: Journal Article

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Creators:
Schwarz, R.¹, Author
Fischer, T.¹, Author
Hanesch, P.², Author
Muschik, T.¹, Author
Kolodzey, J.¹, Author
Cerva, H.¹, Author
Meyerheim, H.L.¹, Author
Scherzer, B.M.U.¹, Author

Affiliations:
1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Dates: Date issued: 1991

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Title: Appl. Surf. Science

Source Genre: Journal

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Pages: - Volume / Issue: 50 Sequence Number: - Start / End Page: 456 - 461 Identifier: -