The Effect of Target Texture on Spatial Distribution of Sputtered Material

Zhukova, Yu.N.; Eisert, J. (Uebers. ); Mashkova, E.S.; Molchanov, V.A.; Eckstein, W.; et al.,

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The Effect of Target Texture on Spatial Distribution of Sputtered Material

Zhukova, Y., Eisert, J. (. )., Mashkova, E., Molchanov, V., Eckstein, W., & et al. (1992). The Effect of Target Texture on Spatial Distribution of Sputtered Material. Poverkhnost, 12, 19-23.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-CC33-1 Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-CC34-0

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Urheber:
Zhukova, Yu.N.¹, Autor
Eisert, J. (Uebers. )¹, Autor
Mashkova, E.S.¹, Autor
Molchanov, V.A.¹, Autor
Eckstein, W.², Autor
et al.¹, Autor

Affiliations:
1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288