The Effect of the Fibre Target Structure on the Spatial Distributions of 
Sputtered Atoms

Eckstein, W.; Mashkova, E.S.; Molchanov, V.A.; Tolmachev, A.I.

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The Effect of the Fibre Target Structure on the Spatial Distributions of Sputtered Atoms

Eckstein, W., Mashkova, E., Molchanov, V., & Tolmachev, A. (1996). The Effect of the Fibre Target Structure on the Spatial Distributions of Sputtered Atoms. Nuclear Instruments and Methods in Physics Research. B, 115, 482-484.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-CEC3-B Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-CEC4-9

Genre: Journal Article

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Creators:
Eckstein, W.¹, Author
Mashkova, E.S.², Author
Molchanov, V.A.², Author
Tolmachev, A.I.², Author

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1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2External Organizations, ou_persistent22

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Dates: Date issued: 1996

Publication Status: Issued

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Title: Nuclear Instruments and Methods in Physics Research. B

Source Genre: Journal

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Pages: - Volume / Issue: 115 Sequence Number: - Start / End Page: 482 - 484 Identifier: -