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  Progress in the Development of a Large-Area RF Plasma Generator

Feist, J.-H., Miley, G., Kraus, W., Elliott, C., Speth, E., Ciric, M., et al. (1996). Progress in the Development of a Large-Area RF Plasma Generator. 16th IEEE/NPSS Symposium Fusion Engineering, Vol. 2, 976-979.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-0028-D061-D Version Permalink: http://hdl.handle.net/11858/00-001M-0000-0028-D062-B
Genre: Conference Paper

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 Creators:
Feist, J.-H.1, Author              
Miley, G.H.2, Author
Kraus, W.1, Author              
Elliott, C.2, Author
Speth, E.1, Author              
Ciric, M.1, Author              
Heinemann, B.1, Author              
Probst, F.1, 3, 4, Author              
Riedl, R.1, Author              
Institute of Electrical and Electronics Engineers, Inc., Piscataway, NJ(US), Editor              
Affiliations:
1Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856318              
2External Organizations, ou_persistent22              
3Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              
4Experimental Plasma Physics 2 (E2), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856292              

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 Dates: 1996
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: -
 Degree: -

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Title: SOFE '95
Place of Event: Champaign, IL(US)
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Title: 16th IEEE/NPSS Symposium Fusion Engineering
Source Genre: Journal
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Affiliations:
Publ. Info: -
Pages: - Volume / Issue: Vol. 2 Sequence Number: - Start / End Page: 976 - 979 Identifier: -