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  Understanding of PS-b-PMMA phase segregation under laser induced millisecond thermal annealing

Jacobs, A. G., Liedel, C., Ober, C. K., & Thompson, M. O. (2015). Understanding of PS-b-PMMA phase segregation under laser induced millisecond thermal annealing. In Alternative Lithographic Technologies VII. doi:10.1117/12.2086057.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-002A-0E22-0 Version Permalink: http://hdl.handle.net/11858/00-001M-0000-002A-0E23-E
Genre: Conference Paper

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 Creators:
Jacobs, Alan G.1, Author
Liedel, Clemens2, Author              
Ober, Christopher K.1, Author
Thompson, Michael O.1, Author
Affiliations:
1external, ou_persistent22              
2External Organizations, ou_persistent22              

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 Dates: 2015
 Publication Status: Published online
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Method: -
 Identifiers: ISI: 000354204900006
DOI: 10.1117/12.2086057
 Degree: -

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Title: Conference on Alternative Lithographic Technologies VII
Place of Event: San Jose, CA
Start-/End Date: 2015-02-23 - 2015-02-26

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Title: Alternative Lithographic Technologies VII
Source Genre: Proceedings
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Publ. Info: -
Pages: SPIE; DNS Elect LLC Volume / Issue: - Sequence Number: 942309 Start / End Page: - Identifier: ISSN: 0277-786X
ISBN: 978-1-62841-525-4

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Title: Proceedings of SPIE
Source Genre: Series
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Pages: - Volume / Issue: 9423 Sequence Number: - Start / End Page: - Identifier: ISSN: 0277-786X