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  Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition

Greczynski, G., Patscheider, J., Lu, J., Alling, B., Ektarawong, A., Jensen, J. M., et al. (2015). Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition. Surface and Coatings Technology, 280, 174-184. doi:10.1016/j.surfcoat.2015.09.001.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-002A-5A1A-E Version Permalink: http://hdl.handle.net/11858/00-001M-0000-002A-5A1D-8
Genre: Journal Article

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 Creators:
Greczynski, Grzegorz1, Author              
Patscheider, Joerg2, Author              
Lu, Jun1, Author              
Alling, Björn3, 4, Author              
Ektarawong, A.5, Author              
Jensen, Jens M.4, Author              
Petrov, Ivan G.1, 6, 7, 8, Author              
Greene, Joseph E.1, 6, 7, 8, Author              
Hultman, Lars4, Author              
Affiliations:
1Thin Film Physics Division, Department of Physics (IFM), Linköping University, SE-581 83 Linköping, Sweden, ou_persistent22              
2Laboratory of Nanoscale Materials Science, Empa, Überlandstr. 129, 8600 Dübendorf, Switzerland, ou_persistent22              
3Adaptive Structural Materials (Simulation), Computational Materials Design, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863339              
4Department of Physics, Chemistry and Biology (IFM), Thin Film Physics Division, Linköping University, Linköping, Sweden, ou_persistent22              
5Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping, Sweden, ou_persistent22              
6Department of Materials Science, University of Illinois, Urbana, IL 61801, USA, ou_persistent22              
7Department of Physics, University of Illinois, Urbana, IL 61801, USA, ou_persistent22              
8Frederick Seitz Materials Research Laboratory, University of Illinois, Urbana, IL 61801, USA, ou_persistent22              

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Language(s): eng - English
 Dates: 2015-09-012015-09-052015-10-25
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Method: -
 Identifiers: DOI: 10.1016/j.surfcoat.2015.09.001
 Degree: -

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Title: Surface and Coatings Technology
  Abbreviation : Surf. Coat. Tech.
Source Genre: Journal
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Publ. Info: Lausanne : Elsevier
Pages: - Volume / Issue: 280 Sequence Number: - Start / End Page: 174 - 184 Identifier: ISSN: 0257-8972
CoNE: /journals/resource/954925496044