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  Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

Ganser, C., Fritz-Popovski, G., Morak, R., Sharifi, P., Marmiroli, B., Sartori, B., et al. (2016). Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers. Beilstein Journal of Nanotechnology, 7, 637-644. doi:10.3762/bjnano.7.56.

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 Creators:
Ganser, Christian1, Author
Fritz-Popovski, Gerhard1, Author
Morak, Roland1, Author
Sharifi, Parvin1, 2, Author              
Marmiroli, Benedetta3, Author
Sartori, Barbara3, Author
Amenitsch, Heinz3, Author
Griesser, Thomas4, Author
Teichert, Christian1, Author
Paris, Oskar1, Author
Affiliations:
1Univ Leoben, Inst Phys, Leoben, Austria, ou_persistent22              
2Research Group Marlow, Max-Planck-Institut für Kohlenforschung, Max Planck Society, ou_1445612              
3Graz Univ Technol, Inst Inorgan Chem, A-8010 Graz, Austria, ou_persistent22              
4Univ Leoben, Chair Chem Polymer Mat, Leoben, Austria, ou_persistent22              

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Free keywords: AFM cantilever; bilayer bending; grazing incidence small-angle X-ray scattering (GISAXS); mesoporous film; sorption-induced deformation
 Abstract: We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using dip coating. This bilayer cantilever is mounted in a humidity controlled AFM, and its deflection is measured as a function of relative humidity. We also investigate a similar film on bulk silicon substrate using grazing-incidence small-angle X-ray scattering (GISAXS), in order to determine nanostructural parameters of the film as well as the water-sorption-induced deformation of the ordered mesopore lattice. The strain of the mesoporous layer is related to the cantilever deflection using simple bilayer bending theory. We also develop a simple quantitative model for cantilever deflection which only requires cantilever geometry and nanostructural parameters of the porous layer as input parameters.

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Language(s): eng - English
 Dates: 2016-04-282016-05-01
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.3762/bjnano.7.56
 Degree: -

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Title: Beilstein Journal of Nanotechnology
Source Genre: Journal
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Publ. Info: Frankfurt am Main : Beilstein-Institut
Pages: - Volume / Issue: 7 Sequence Number: - Start / End Page: 637 - 644 Identifier: ISSN: 2190-4286
CoNE: https://pure.mpg.de/cone/journals/resource/2190-4286