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  Evaluation of subsurface damage by light scattering techniques

Trost, M., Herffurth, T., Schmitz, D., Schröder, S., Duparré, A., & Tünnermann, A. (2013). Evaluation of subsurface damage by light scattering techniques. Applied Optics, 52(26), 6579-6588. doi:10.1364/AO.52.006579.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-002B-23FA-2 Version Permalink: http://hdl.handle.net/11858/00-001M-0000-002B-23FB-F
Genre: Journal Article

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http://dx.doi.org/10.1364/AO.52.006579 (Publisher version)
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 Creators:
Trost, Marcus1, 2, Author
Herffurth, Tobias1, 2, Author
Schmitz, David1, 3, 4, Author              
Schröder, Sven1, Author
Duparré, Angela1, Author
Tünnermann, Andreas1, 2, Author
Affiliations:
1Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Straße 7, 07745 Jena, Germany , ou_persistent22              
2Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena, Max Wien Platz 1, 07743 Jena, Germany , ou_persistent22              
3International Max Planck Research School for Ultrafast Imaging & Structural Dynamics (IMPRS-UFAST), Max Planck Institute for the Structure and Dynamics of Matter, Max Planck Society, ou_2266714              
4Max-Planck-Institut für Kernphysik, Saupfercheckweg 1, 69117 Heidelberg, Germany , ou_persistent22              

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Free keywords: OCIS codes: (290.0290) Scattering; (120.4290) Nondestructive testing; (160.4670) Optical materials.
 Abstract: Subsurface damage (SSD) in optical components is almost unavoidably caused by mechanical forces involved during grinding and polishing and can be a limiting factor, in particular for applications that require high laser powers or an extreme material strength. In this paper, we report on the characterization of SSD in ground and polished optical surfaces, using different light scattering measurement techniques in the visible and extreme ultraviolet spectral ranges. The materials investigated include fused silica, borosilicate glass, and calcium fluoride. The scattering results are directly linked to classical destructive SSD characterization techniques, based on white light interferometry, optical microscopy, and atomic force microscopy of the substrate topography and cross sections obtained after etching in hydrofluoric acid and fracturing.

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Language(s): eng - English
 Dates: 2013-08-122013-05-282013-08-172013-08-192013-09-09
 Publication Status: Published in print
 Pages: 10
 Publishing info: -
 Table of Contents: -
 Rev. Method: Peer
 Identifiers: DOI: 10.1364/AO.52.006579
 Degree: -

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Title: Applied Optics
Source Genre: Journal
 Creator(s):
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Publ. Info: Washington, DC : Optical Society of America
Pages: - Volume / Issue: 52 (26) Sequence Number: - Start / End Page: 6579 - 6588 Identifier: ISSN: 0003-6935
CoNE: /journals/resource/991042728167604