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  Chemical and optical characterisation of atomic layer deposition aluminium doped ZnO films for photovoltaics by glow discharge optical emission spectrometry

Schmitt, S. W., Gamez, G., Sivakov, V., Schubert, M., Christiansen, S. H., & Michler, J. (2011). Chemical and optical characterisation of atomic layer deposition aluminium doped ZnO films for photovoltaics by glow discharge optical emission spectrometry. JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 26(4), 822-827. doi:10.1039/c0ja00158a.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-002D-6A65-F Version Permalink: https://hdl.handle.net/11858/00-001M-0000-002D-6A66-D
Genre: Journal Article

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 Creators:
Schmitt, S. W.1, Author           
Gamez, G.2, Author
Sivakov, V.2, Author
Schubert, M.2, Author
Christiansen, S. H.1, 3, Author           
Michler, J.2, Author
Affiliations:
1Micro- & Nanostructuring, Technology Development and Service Units, Max Planck Institute for the Science of Light, Max Planck Society, ou_2364725              
2external, ou_persistent22              
3Christiansen Research Group, Research Groups, Max Planck Institute for the Science of Light, Max Planck Society, ou_2364716              

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Free keywords: INTERFERENCEChemistry; Spectroscopy;
 Abstract: Aluminium doped ZnO (AZO) alloy films produced by atomic layer deposition (ALD) are analysed by glow discharge optical emission spectrometry (GD-OES). A measurement procedure is established, to determine simultaneously thickness, mean chemical composition and refractive index of homogeneous films using GD-OES and profilometry measurements. The GD-OES measured Al contents of the AZO films lie below those expected for the realised ALD cycles. Determined refractive indices are of the same accuracy as ellipsometry measurements and are dependent on the film composition as well as on the wavelength of the spectral lines used for analysis. The findings support the use of GD-OES as an analysis technique in the development of photovoltaic thin films.

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Language(s): eng - English
 Dates: 2011
 Publication Status: Issued
 Pages: 6
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: ISI: 000288703300015
DOI: 10.1039/c0ja00158a
 Degree: -

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Title: JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY
Source Genre: Journal
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Publ. Info: THOMAS GRAHAM HOUSE, SCIENCE PARK, MILTON RD, CAMBRIDGE CB4 0WF, CAMBS, ENGLAND : ROYAL SOC CHEMISTRY
Pages: - Volume / Issue: 26 (4) Sequence Number: - Start / End Page: 822 - 827 Identifier: ISSN: 0267-9477