English
 
Help Privacy Policy Disclaimer
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT
Add to Basket
 Local TagsRelease HistoryDetailsSummary
  Characterization of cylindrical micro-lenses in transmitted light and with grazing incidence interferometry in reflected light

Lamprecht, J., Lindlein, N., & Schwider, J. (2006). Characterization of cylindrical micro-lenses in transmitted light and with grazing incidence interferometry in reflected light. In OPTICAL MICRO- AND NANOMETROLOGY IN MICROSYSTEMS TECHNOLOGY. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA: SPIE-INT SOC OPTICAL ENGINEERING. doi:10.1117/12.662691.

Item is

 

show all hide all

Basic

show hide
Item Permalink: https://hdl.handle.net/11858/00-001M-0000-002D-6DB8-3 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-002D-6DB9-1
Genre: Conference Paper

Files

show Files

Locators

show

Creators

show
hide
 Creators:
Lamprecht, Juergen1, Author
Lindlein, Norbert2, Author           
Schwider, Johannes2, Author           
Affiliations:
1external, ou_persistent22              
2Max Planck Research Group, Max Planck Institute for the Science of Light, Max Planck Society, ou_2364712              

Content

show
hide
Free keywords: SURFACESScience & Technology - Other Topics; Instruments & Instrumentation; Optics; phase shifting interferometry; null test; cylindrical micro lens; diffractive optics; grazing incidence;
 Abstract: High numerical aperture cylindrical micro-lenses are needed in collimating the laser light from laser bars in the near infrared. Diffraction limited performance of such collimation lenses can only be obtained if the surface shape deviates strongly from circular symmetry. Therefore, null tests make the use of diffractive optical elements (DOE) necessary. For performance test at the design wavelength the reference DOE produces an ideal cylinder wave which enables the compensation of the wave front coming from the micro-lens to a plane wave. The use of a DOE-master enables beside the null test geometry also a removal of the anamorphic distortion due to the cylinder geometry. The DOEs having a numerical aperture of 0.8 are produced on an e-beam machine. The measurement of the wave aberrations is done with the help of the phase shifting technique. Alignment aberrations are eliminated by a least square fit of suitable misalignment functionals derived from an analytic approximation. The shape of the micro-lenses is tested in reflected light showing surface defects directly. The cylinder symmetry allows for a grazing incidence test using two DOE with nearly constant spatial frequency. There are no limitations concerning the test of high numerical aperture surfaces since the structure of the diffractive elements are parallel curves to the profile curve. The mean spatial frequency of the DOE defines the effective wavelength. Since we use a diffractive interferometer the effective wavelength is identical to the pitch of the DOE. Usually pitches between 4-10 mu m are used resulting in a fringe sensitivity of 2-5 mu m. The test delivers the deviation of the surface from the ideal form. In the case of non-circular symmetry the DOE deviates from the axicon type DOE. In addition to the shape deviations also the radius of curvature at the vertex can be measured. The stage for the cylindrical micro-lens is equipped with a length measuring device using grating references from Renishaw providing a length increment of 0.1 mu m. With the axicon DOE there are two positions where nearly fluffed out fringes can be observed. Starting from the basic test position the lens can be moved until the vertex of the lens coincides with the focal line of the wave generated by the central part of the DOE. The distance between these two positions gives the radius of curvature for the vertex. Modem manufacturing of micro-lenses comprises also hot embossing in plastics or even into glass. Because of the small dimensions of the lenses and the required accuracy of the surface shape also tests of the impressing mould have to be carried out. The DOE approach enables also the test of the embossing form with the same sensitivity as the final test of the lens. Measuring results for the two test methods will be given.

Details

show
hide
Language(s): eng - English
 Dates: 2006
 Publication Status: Published online
 Pages: 12
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: ISI: 000238886600040
DOI: 10.1117/12.662691
 Degree: -

Event

show
hide
Title: Conference on Optical Micro- and Nanometrology in Microsystems Technology
Place of Event: Strasbourg, FRANCE
Start-/End Date: 2006-04-05 - 2006-04-07

Legal Case

show

Project information

show

Source 1

show
hide
Title: OPTICAL MICRO- AND NANOMETROLOGY IN MICROSYSTEMS TECHNOLOGY
  Alternative Title : PROC SPIE
Source Genre: Proceedings
 Creator(s):
Affiliations:
Publ. Info: 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA : SPIE-INT SOC OPTICAL ENGINEERING
Pages: SPIE Europe, Conseil Gen Bas Rhin, Communaute Urbaine Strasbourg, Reg Alsace, Alsace Dev Agcy Volume / Issue: - Sequence Number: 618816 Start / End Page: - Identifier: ISSN: 0277-786X
ISBN: 0-8194-6244-6

Source 2

show
hide
Title: Proceedings of SPIE
  Alternative Title : PROC SPIE
Source Genre: Series
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 6188 Sequence Number: - Start / End Page: - Identifier: ISSN: 0277-786X