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  Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching

Balderas-Valadez, R., Agarwal, V., & Pacholski, C. (2016). Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching. RSC Advances, 6(26), 21430-21434. doi:10.1039/c5ra26816h.

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Balderas-Valadez, R.F., Author
Agarwal, V., Author
Pacholski, Claudia1, 2, Author              
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1Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society, ou_2364731              
2Biophysical Chemistry, Institute of Physical Chemistry, University of Heidelberg, 69120 Heidelberg, Germany, ou_persistent22              

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 Abstract: Optical biosensors based on porous silicon were fabricated by metal assisted chemical etching. Thereby double layered porous silicon structures were obtained consisting of porous pillars with large pores on top of a porous silicon layer with smaller pores. These structures showed a similar sensing performance in comparison to electrochemically produced porous silicon interferometric sensors.

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Language(s): eng - English
 Dates: 2015-12-152016-02-1720162016
 Publication Status: Published in print
 Pages: 5
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 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1039/c5ra26816h
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Title: RSC Advances
  Abbreviation : RSC Adv.
Source Genre: Journal
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Publ. Info: Cambridge, UK : Royal Society of Chemistry
Pages: - Volume / Issue: 6 (26) Sequence Number: - Start / End Page: 21430 - 21434 Identifier: ISSN: 2046-2069
CoNE: https://pure.mpg.de/cone/journals/resource/2046-2069