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  Enhanced sputter yields of ion irradiated Au nano particles: energy and size dependence

Holland-Moritz, H., Scheeler, S., Stanglmair, C., Pacholski, C., & Ronning, C. (2015). Enhanced sputter yields of ion irradiated Au nano particles: energy and size dependence. Nanotechnology, 26: 325301, pp. 1-7. doi:10.1088/0957-4484/26/32/325301.

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Nanotechnol_26_2015_325301.pdf (Any fulltext), 958KB
 
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 Creators:
Holland-Moritz, Henry, Author
Scheeler, Sebastian1, Author              
Stanglmair, Christoph1, Author              
Pacholski, Claudia1, 2, Author              
Ronning, Carsten, Author
Affiliations:
1Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society, ou_2364731              
2Biophysical Chemistry, Institute of Physical Chemistry, University of Heidelberg, 69120 Heidelberg, Germany, ou_persistent22              

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Free keywords: sputtering; nanofabrication; nanoparticles; ion beams; ion solid interaction
 Abstract: Hexagonally arranged Au nanoparticles exhibiting a broad Gaussian-shaped size distribution ranging from 30 nm to 80 nm were deposited on Si substrates and irradiated with Ar+ and Ga+ ions with various energies from 20 to 350 keV and 1 to 30 keV, respectively. The size and energy dependence of the sputter yield were measured using high-resolution scanning electron microscopy image analysis. These results were compared to simulation results obtained by iradina, a Monte Carlo code, which takes the specifics of the nano geometry into account. The experimental sputter yields are significantly higher than simulated sputter yields for both bulk and the nano geometry. The difference can be clearly attributed to thermally driven effects, which significantly increase the measured sputter yields.

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Language(s): eng - English
 Dates: 2015-06-192015-04-302015-06-242015-07-23
 Publication Status: Published in print
 Pages: 7
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1088/0957-4484/26/32/325301
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Title: Nanotechnology
Source Genre: Journal
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Publ. Info: Bristol, UK : IOP Pub.
Pages: - Volume / Issue: 26 Sequence Number: 325301 Start / End Page: 1 - 7 Identifier: ISSN: 0957-4484
CoNE: https://pure.mpg.de/cone/journals/resource/954925577042