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  Antireflective subwavelength structures on microlens arrays—comparison of various manufacturing techniques

Pacholski, C., Morhard, C., Spatz, J. P., Lehr, D., Schulze, M., Kley, E.-B., et al. (2012). Antireflective subwavelength structures on microlens arrays—comparison of various manufacturing techniques. Applied Optics, 51(1), 8-14. doi:10.1364/AO.51.000008.

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Genre: Journal Article
Alternative Title : Antireflective subwavelength structures on microlens arrays-comparison of various manufacturing techniques

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 Creators:
Pacholski, Claudia1, 2, Author              
Morhard, Christoph1, Author              
Spatz, Joachim P.1, 2, Author              
Lehr, Dennis, Author
Schulze, Marcel, Author
Kley, Ernst-Bernhard, Author
Tünnermann, Andreas, Author
Helgert, Michael, Author
Sundermann, Michael, Author
Brunner, Robert, Author
Affiliations:
1Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society, ou_2364731              
2Biophysical Chemistry, Institute of Physical Chemistry, University of Heidelberg, 69120 Heidelberg, Germany, ou_persistent22              

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 Abstract: Antireflective subwavelength structures (ARS) resembling nanostructures found on the cornea of night-active insects reduce the reflection of light by providing a gradual change in the refractive index at the interface. These artificial ARS have mainly been fabricated by a combination of conventional lithography and reactive ion etching, which constrains their application to planar substrates. We report on the fabrication of ARS using three different techniques including bottom-up and top-down methods as well as their combination on microlens arrays (MLAs) made of fused silica. The optical performance of the resulting ARS on the MLAs is as good as ARS fabricated on planar substrates with increased transmission of up to 96% at certain wavelengths.

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Language(s): eng - English
 Dates: 2011-10-162011-08-112011-10-312011-12-222012-01-01
 Publication Status: Published in print
 Pages: 7
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
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Title: Applied Optics
Source Genre: Journal
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Publ. Info: Washington, DC : Optical Society of America
Pages: - Volume / Issue: 51 (1) Sequence Number: - Start / End Page: 8 - 14 Identifier: ISSN: 0003-6935
CoNE: https://pure.mpg.de/cone/journals/resource/991042728167604