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  Micro-nanostructured interfaces fabricated by the use of inorganic block copolymer micellar monolayers as negative resist for electron beam lithography

Glass, R., Arnold, M., Blümmel, J., Küller, A., Möller, M., & Spatz, J. P. (2003). Micro-nanostructured interfaces fabricated by the use of inorganic block copolymer micellar monolayers as negative resist for electron beam lithography. Advanced Functional Materials, 13(7), 569-575. doi:10.1002/adfm.200304331.

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AdvFunctMater_13_2003_569.pdf (Any fulltext), 442KB
 
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 Creators:
Glass, Roman1, Author              
Arnold, Marco1, Author              
Blümmel, Jacques1, Author              
Küller, Alexander, Author
Möller, Martin, Author
Spatz, Joachim P.1, 2, Author              
Affiliations:
1Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society, ou_2364731              
2Biophysical Chemistry, Institute of Physical Chemistry, University of Heidelberg, 69120 Heidelberg, Germany, ou_persistent22              

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Free keywords: Block copolymer; Gold; Micelles, block copolymer; Nanolithography, electron beam; Nanoparticle arrays, metal
 Abstract: This paper introduces an approach where the match of two different length scales, i.e., pattern from self-assembly of block copolymer micelles (< 100 nm) and electron-beam (e-beam) writing (> 50 nm), allow the grouping of nanometer-sized gold clusters in very small numbers in even aperiodic pattern and separation of these groups at length scales that are not accessible by pure self-assembly. Thus, we could demonstrate the grouping of Au nanoclusters in different geometries such as squares, rings, or spheres.

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Language(s): eng - English
 Dates: 2003-01-132003-03-262003-07-012003-07-01
 Publication Status: Published in print
 Pages: 7
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: DOI: 10.1002/adfm.200304331
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Title: Advanced Functional Materials
  Other : Adv. Funct. Mater.
Source Genre: Journal
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Publ. Info: Weinheim : Wiley-VCH Verlag GmbH
Pages: - Volume / Issue: 13 (7) Sequence Number: - Start / End Page: 569 - 575 Identifier: ISSN: 1616-301X
CoNE: https://pure.mpg.de/cone/journals/resource/954925596563