Resolving the mechanical performance of materials in microelectronic components 
with µm spatial resolution

Dehm, Gerhard

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Resolving the mechanical performance of materials in microelectronic components with µm spatial resolution

Dehm, G. (2017). Resolving the mechanical performance of materials in microelectronic components with µm spatial resolution. Talk presented at FIMPART - Frontiers in Materials Processing Applications, Research and Technology. Bordeaux, France. 2017-07-09 - 2017-07-12.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-002D-C0A2-3 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-002D-C0A3-1

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Creators:
Dehm, Gerhard¹, Author

Affiliations:
1Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863398

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Language(s): eng - English

Dates: Created: 2017-07

Publication Status: Not specified

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Title: FIMPART - Frontiers in Materials Processing Applications, Research and Technology

Place of Event: Bordeaux, France

Start-/End Date: 2017-07-09 - 2017-07-12

Invited: Yes

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