Compositional analysis on ensemble of InGaAs fins using TEM and Rutherford 
backscattering spectrometry

Laricchiuta, G.; Vandervorst, W.; Vickridge, I.; Mayer, M.; Favia, P.; Schulze, A.; Meersschaut, J.

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Compositional analysis on ensemble of InGaAs fins using TEM and Rutherford backscattering spectrometry

Laricchiuta, G., Vandervorst, W., Vickridge, I., Mayer, M., Favia, P., Schulze, A., et al. (2017). Compositional analysis on ensemble of InGaAs fins using TEM and Rutherford backscattering spectrometry. Talk presented at 2017 E-MRS Fall Meeting. Warsaw. 2017-09-18 - 2017-09-21.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-002D-F4E7-4 Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-002D-F4E8-2

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Urheber:
Laricchiuta, G.¹, Autor
Vandervorst, W.¹, Autor
Vickridge, I.¹, Autor
Mayer, M.², Autor
Favia, P.¹, Autor
Schulze, A.¹, Autor
Meersschaut, J.¹, Autor

Affiliations:
1External Organizations, ou_persistent22
2Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856327