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  Compositional analysis on ensemble of InGaAs fins using TEM and Rutherford backscattering spectrometry

Laricchiuta, G., Vandervorst, W., Vickridge, I., Mayer, M., Favia, P., Schulze, A., et al. (2017). Compositional analysis on ensemble of InGaAs fins using TEM and Rutherford backscattering spectrometry. Talk presented at 2017 E-MRS Fall Meeting. Warsaw. 2017-09-18 - 2017-09-21.

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 Creators:
Laricchiuta, G.1, Author
Vandervorst, W.1, Author
Vickridge, I.1, Author
Mayer, M.2, Author           
Favia, P.1, Author
Schulze, A.1, Author
Meersschaut, J.1, Author
Affiliations:
1External Organizations, ou_persistent22              
2Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856327              

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Language(s): eng - English
 Dates: 2017
 Publication Status: Submitted
 Pages: -
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 Rev. Type: -
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Title: 2017 E-MRS Fall Meeting
Place of Event: Warsaw
Start-/End Date: 2017-09-18 - 2017-09-21

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