Fokussierte Ionenstrahl-Technik (FIB) in der Mikro- und Nanomechanik

Motz, Christian; Kiener, Daniel; Schöberl, Thomas; Pippan, Reinhard; Dehm, Gerhard

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Fokussierte Ionenstrahl-Technik (FIB) in der Mikro- und Nanomechanik

Motz, C., Kiener, D., Schöberl, T., Pippan, R., & Dehm, G. (2005). Fokussierte Ionenstrahl-Technik (FIB) in der Mikro- und Nanomechanik. In W. Rom (Ed.), Handbuch der Nanoanalytik Steiermark, NanoNet Styria (1, pp. 1-311). Graz, Austria: W. Rom.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-002E-281F-0 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-002E-2820-A

Genre: Book Chapter

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Creators:
Motz, Christian¹, Author
Kiener, Daniel², Author
Schöberl, Thomas³, Author
Pippan, Reinhard⁴, Author
Dehm, Gerhard^{1, 5}, Author

Affiliations:
1Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, Leoben, Austria, ou_persistent22
2Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, Austria, ou_persistent22
3Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, A-8700 Leoben, Austria, ou_persistent22
4Erich Schmid Institute of Materials Science, Austrian Academy of Sciences and Department Material Physics, Leoben, Austria, ou_persistent22
5Department of Materials Physics, Montanuniversität Leoben, Austria, ou_persistent22

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Dates: Date issued: 2005

Publication Status: Issued

Pages: 2

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Title: Handbuch der Nanoanalytik Steiermark, NanoNet Styria

Source Genre: Book

Creator(s):
Rom, Werner¹, Editor

Affiliations:
1 Technische Universität Graz Forschungsinstitut für Elektronenmikroskopie und Feinstrukturforschung, Zentrum für Elektronenmikroskopie Graz, ou_persistent22

Publ. Info: Graz, Austria : W. Rom, 1

Pages: 311 Volume / Issue: - Sequence Number: - Start / End Page: 1 - 311 Identifier: -