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  Chemical Sputtering of Hydrocarbon Layers

Jacob, W., Hopf, C., von Keudell, A., Meier, M., & Schwarz-Selinger, T. (2003). Chemical Sputtering of Hydrocarbon Layers. Talk presented at ASEVA Workshop 14: Reactive Plasmas - Physical and Chemical Processes in Reactive Hydrocarbon Plasmas in Contact with Surfaces. Avila. 2003-07-22 - 2003-07-25.

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 Creators:
Jacob, W.1, 2, Author              
Hopf, C.1, 2, Author              
von Keudell, A.1, 2, Author              
Meier, M.1, 2, Author              
Schwarz-Selinger, T.1, 2, Author              
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              
2Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325              

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Language(s): eng - English
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 Publication Status: Not specified
 Pages: -
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 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 112668
 Degree: -

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Title: ASEVA Workshop 14: Reactive Plasmas - Physical and Chemical Processes in Reactive Hydrocarbon Plasmas in Contact with Surfaces
Place of Event: Avila
Start-/End Date: 2003-07-22 - 2003-07-25

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