Chemical Sputtering of Hydrocarbon Layers

Jacob, W.; Hopf, C.; von Keudell, A.; Meier, M.; Schwarz-Selinger, T.

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Chemical Sputtering of Hydrocarbon Layers

Jacob, W., Hopf, C., von Keudell, A., Meier, M., & Schwarz-Selinger, T. (2003). Chemical Sputtering of Hydrocarbon Layers. Talk presented at ASEVA Workshop 14: Reactive Plasmas - Physical and Chemical Processes in Reactive Hydrocarbon Plasmas in Contact with Surfaces. Avila. 2003-07-22 - 2003-07-25.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-002E-9422-2 Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-002E-9423-F

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Urheber:
Jacob, W.^{1, 2}, Autor
Hopf, C.^{1, 2}, Autor
von Keudell, A.^{1, 2}, Autor
Meier, M.^{1, 2}, Autor
Schwarz-Selinger, T.^{1, 2}, Autor

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325