von Keudell, A., Hopf, C., Meier, M., Schwarz-Selinger, T., & Jacob, W. (2003). Elementary Surface Processes during Growth of a-C:H Films. Talk presented at ASEVA Workshop 14: Reactive Plasmas - Physical and Chemical Processes in Reactive Hydrocarbon Plasmas in Contact with Surfaces. Avila. 2003-07-22 - 2003-07-25.