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  Deposition of hydrogenated carbon films from nitrogen containing methane plasmas

Schwarz-Selinger, T., Hopf, C., Meier, M., & Jacob, W. (2003). Deposition of hydrogenated carbon films from nitrogen containing methane plasmas. Poster presented at 10th International Workshop on Carbon Materials for Fusion Application, Jülich.

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 Creators:
Schwarz-Selinger, T.1, 2, Author              
Hopf, C.1, 2, Author              
Meier, M.1, 2, Author              
Jacob, W.1, 2, Author              
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              
2Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325              

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Language(s): eng - English
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 Publication Status: Not specified
 Pages: -
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 Rev. Type: -
 Identifiers: eDoc: 117342
 Degree: -

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Title: 10th International Workshop on Carbon Materials for Fusion Application
Place of Event: Jülich
Start-/End Date: 2003-09-17 - 2003-09-19

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