Deposition of hydrogenated carbon films from nitrogen containing methane plasmas

Schwarz-Selinger, T.; Hopf, C.; Meier, M.; Jacob, W.

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Deposition of hydrogenated carbon films from nitrogen containing methane plasmas

Schwarz-Selinger, T., Hopf, C., Meier, M., & Jacob, W. (2003). Deposition of hydrogenated carbon films from nitrogen containing methane plasmas. Poster presented at 10th International Workshop on Carbon Materials for Fusion Application, Jülich.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0000-04D1-F Version Permalink: https://hdl.handle.net/21.11116/0000-0000-04D2-E

Genre: Poster

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Creators:
Schwarz-Selinger, T.^{1, 2}, Author
Hopf, C.^{1, 2}, Author
Meier, M.^{1, 2}, Author
Jacob, W.^{1, 2}, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325

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Language(s): eng - English

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Publication Status: Not specified

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Identifiers: eDoc: 117342

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Title: 10th International Workshop on Carbon Materials for Fusion Application

Place of Event: Jülich

Start-/End Date: 2003-09-17 - 2003-09-19

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