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  Deposition of Hydrogenated Carbon Films from Nitrogen Containing Methane Plasmas

Schwarz-Selinger, T., & Jacob, W. (2003). Deposition of Hydrogenated Carbon Films from Nitrogen Containing Methane Plasmas. Talk presented at ASEVA Workshop 14: Reactive Plasmas - Physical and Chemical Processes in Reactive Hydrocarbon Plasmas in Contact with Surfaces. Avila. 2003-07-22 - 2003-07-25.

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 Creators:
Schwarz-Selinger, T.1, 2, Author              
Jacob, W.1, 2, Author              
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              
2Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325              

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Language(s): eng - English
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 Publication Status: Not specified
 Pages: -
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 Rev. Type: -
 Identifiers: eDoc: 120420
 Degree: -

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Title: ASEVA Workshop 14: Reactive Plasmas - Physical and Chemical Processes in Reactive Hydrocarbon Plasmas in Contact with Surfaces
Place of Event: Avila
Start-/End Date: 2003-07-22 - 2003-07-25

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