Chemical erosion of thin C films by deuterium ions

Linsmeier, Ch.

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Chemical erosion of thin C films by deuterium ions

Linsmeier, C. (2004). Chemical erosion of thin C films by deuterium ions. Talk presented at IPP Workshop on Chemical Sputtering. Garching bei München. 2004-02-12.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0000-0805-2 Version Permalink: https://hdl.handle.net/21.11116/0000-0000-0806-1

Genre: Talk

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Creators:
Linsmeier, Ch.¹, Author

Affiliations:
1Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328

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Language(s): eng - English

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Publication Status: Not specified

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Identifiers: eDoc: 176195

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Title: IPP Workshop on Chemical Sputtering

Place of Event: Garching bei München

Start-/End Date: 2004-02-12

Invited: Yes

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