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  Measurements of the negative ion concentration in argon-oxygen discharges using photodetachment

Sydorenko, N., Grulke, O., Stark, A., & Klinger, T. (2007). Measurements of the negative ion concentration in argon-oxygen discharges using photodetachment. Poster presented at DPG AMOP-Frühjahrstagung, Düsseldorf.

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 Creators:
Sydorenko, N.1, 2, Author           
Grulke, O.1, 2, Author           
Stark, A.1, 2, Author           
Klinger, T.1, 2, 3, Author           
Affiliations:
1VINETA, Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856311              
2Stellarator Scenario Development (E5), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856285              
3Office of the Director (DI), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856325              

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Free keywords: experiment VINETA
 Abstract: The formation of negative ions has attracted attention in plasma processing application like e.g. semiconductor fabrication, where negative ions can considerably effect in the etching quality. High density argon and oxygen plasmas are generated during helicon discharge in the experiment VINETA. Measurements of the negative oxygen ion concentration for different discharge scenarios will be presented. The relative concentration of negative ions is measured by Langmuir probe techniques and by laser-induced photedetachment combined with microwave interferometry. Special attention is paid to the dependence of the negative ion concentration on the gas pressure, argonadmixture, and RF power. By radially scanning the laser used for photodetachment also the radial profile of the negative ion concentration is resolved and will be compared to the radial plasma profiles.

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Language(s): eng - English
 Dates:
 Publication Status: Not specified
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 313153
Other: Verhandl. DPG (VI) 42, 3, P 16.2 (2007)
 Degree: -

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Title: DPG AMOP-Frühjahrstagung
Place of Event: Düsseldorf
Start-/End Date: 2007-03-19 - 2007-03-23

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