CC-RF discharge in CF4/H2: Simulation and experiment

Stoppa, G.; Stepanov, S.; Schneider, R.; Meichsner, J.

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CC-RF discharge in CF₄/H₂: Simulation and experiment

Stoppa, G., Stepanov, S., Schneider, R., & Meichsner, J. (2011). CC-RF discharge in CF₄/H₂: Simulation and experiment. Poster presented at DPG-Frühjahrstagung 2011, Kiel.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0000-5C1C-B Version Permalink: https://hdl.handle.net/21.11116/0000-0000-5C1D-A

Genre: Poster

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Creators:
Stoppa, G.¹, Author
Stepanov, S.², Author
Schneider, R.¹, Author
Meichsner, J.², Author

Affiliations:
1Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856287
2Institut für Physik, Ernst-Moritz-Arndt Universität, Greifswald, Germany, ou_persistent22

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Language(s): eng - English

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Publication Status: Not specified

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Identifiers: eDoc: 549016
Other: Verhandl. DPG (VI) 46, 4, P 16.14 (2011)

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Title: DPG-Frühjahrstagung 2011

Place of Event: Kiel

Start-/End Date: 2011-03-28 - 2011-03-31

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