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  Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers

Matoy, K., Schönherr, H., Detzel, T., & Dehm, G. (2010). Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers. Thin Solid Films, 518(20), 5796-5801. doi:10.1016/j.tsf.2010.05.114.

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Item Permalink: http://hdl.handle.net/21.11116/0000-0001-925B-4 Version Permalink: http://hdl.handle.net/21.11116/0000-0001-9264-9
Genre: Journal Article

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 Creators:
Matoy, Kurt1, 2, 3, Author              
Schönherr, Helmut4, Author              
Detzel, Thomas5, Author              
Dehm, Gerhard6, 7, Author              
Affiliations:
1Kompetenzzentrum Automobil- und Industrie-Elektronik GmbH, A-9524 Villach, Austria, ou_persistent22              
2Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, A-8700 Leoben, Austria, ou_persistent22              
3Department of Materials Physics, Montanuniversität Leoben, Leoben, Austria, ou_persistent22              
4Infineon Technologies AG Austria, Villach, Austria, ou_persistent22              
5Infineon Technologies Austria AG, A-9500 Villach, Austria, ou_persistent22              
6Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, Leoben, Austria, ou_persistent22              
7Department of Materials Physics, Montanuniversität Leoben, Austria, ou_persistent22              

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Language(s): eng - English
 Dates: 2010-06-042010-08-02
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Method: Peer
 Identifiers: DOI: 10.1016/j.tsf.2010.05.114
 Degree: -

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Title: Thin Solid Films
  Abbreviation : Thin Solid Films
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 518 (20) Sequence Number: - Start / End Page: 5796 - 5801 Identifier: ISSN: 0040-6090
CoNE: https://pure.mpg.de/cone/journals/resource/954925449792