Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx 
multi-layers

Matoy, Kurt; Schönherr, Helmut; Detzel, Thomas; Dehm, Gerhard

doi:10.1016/j.tsf.2010.05.114

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Micron-sized fracture experiments on amorphous SiO_x films and SiO_x/SiN_x multi-layers

Matoy, K., Schönherr, H., Detzel, T., & Dehm, G. (2010). Micron-sized fracture experiments on amorphous SiO_x films and SiO_x/SiN_x multi-layers. Thin Solid Films, 518(20), 5796-5801. doi:10.1016/j.tsf.2010.05.114.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0001-925B-4 Version Permalink: https://hdl.handle.net/21.11116/0000-0001-9264-9

Genre: Journal Article

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Creators:
Matoy, Kurt^{1, 2, 3}, Author
Schönherr, Helmut⁴, Author
Detzel, Thomas⁵, Author
Dehm, Gerhard^{6, 7}, Author

Affiliations:
1Kompetenzzentrum Automobil- und Industrie-Elektronik GmbH, A-9524 Villach, Austria, ou_persistent22
2Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, A-8700 Leoben, Austria, ou_persistent22
3Department of Materials Physics, Montanuniversität Leoben, Leoben, Austria, ou_persistent22
4Infineon Technologies AG Austria, Villach, Austria, ou_persistent22
5Infineon Technologies Austria AG, A-9500 Villach, Austria, ou_persistent22
6Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, Leoben, Austria, ou_persistent22
7Department of Materials Physics, Montanuniversität Leoben, Austria, ou_persistent22

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Language(s): eng - English

Dates: Published Online: 2010-06-04Date issued: 2010-08-02

Publication Status: Issued

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Rev. Type: Peer

Identifiers: DOI: 10.1016/j.tsf.2010.05.114

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Title: Thin Solid Films

Abbreviation : Thin Solid Films

Source Genre: Journal

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Pages: - Volume / Issue: 518 (20) Sequence Number: - Start / End Page: 5796 - 5801 Identifier: ISSN: 0040-6090
CoNE: https://pure.mpg.de/cone/journals/resource/954925449792