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  Small-scale plasticity in thin Cu and Al films

Dehm, G., Balk, T. J., Edongué, H., & Arzt, E. (2003). Small-scale plasticity in thin Cu and Al films. Microelectronic Engineering, 70(2-4), 412-424.

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Item Permalink: http://hdl.handle.net/21.11116/0000-0001-97EE-9 Version Permalink: http://hdl.handle.net/21.11116/0000-0001-97EF-8
Genre: Conference Paper

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 Creators:
Dehm, Gerhard1, Author              
Balk, Thomas John1, Author              
Edongué, Hervais1, Author              
Arzt, Eduard1, Author              
Affiliations:
1Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655              

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Free keywords: MPI für Metallforschung; Abt. Arzt;
 Abstract: -

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Language(s): eng - English
 Dates: 2003-11
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Method: Peer
 Identifiers: eDoc: 56103
DOI: 10.1016/S0167-9317(03)00395-2
 Degree: -

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Title: Materials for Advanced Metallization 2003
Place of Event: La Londe Les Maures, France
Start-/End Date: 2003-03-09 - 2003-03-12

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Title: Microelectronic Engineering
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: Amsterdam : Elsevier
Pages: - Volume / Issue: 70 (2-4) Sequence Number: - Start / End Page: 412 - 424 Identifier: ISSN: 0167-9317
CoNE: /journals/resource/954925484690