Contamination of chip surfaces by particles during destructive physical 
analysis of integrated circuit devices

Weimer, J.J.; Kokosinski, J.; Cook, M.R.; Grunze, M.

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Contamination of chip surfaces by particles during destructive physical analysis of integrated circuit devices

Weimer, J., Kokosinski, J., Cook, M., & Grunze, M. (1988). Contamination of chip surfaces by particles during destructive physical analysis of integrated circuit devices. In K. L. Mittal (Ed.), Particles on Surfaces 1 (pp. 69-76). New York [u.a.]: Plenum Pr.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0001-8E5D-8 Version Permalink: https://hdl.handle.net/21.11116/0000-0001-8E5E-7

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Mittal_1988_ParticlesSurfaces1_69.pdf (Any fulltext), 577KB

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Creators:
Weimer, J.J., Author
Kokosinski, J., Author
Cook, M.R., Author
Grunze, M.¹, Author

Affiliations:
1Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society, ou_2364731

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Language(s): eng - English

Dates: Date issued: 1988

Publication Status: Issued

Pages: 8

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Title: Particles on Surfaces 1

Source Genre: Book

Creator(s):
Mittal, K. L., Editor

Affiliations:
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Publ. Info: New York [u.a.] : Plenum Pr

Pages: IX, 384 Volume / Issue: - Sequence Number: - Start / End Page: 69 - 76 Identifier: ISBN: 0-306-43030-4