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  Contamination of chip surfaces by particles during destructive physical analysis of integrated circuit devices

Weimer, J., Kokosinski, J., Cook, M., & Grunze, M. (1988). Contamination of chip surfaces by particles during destructive physical analysis of integrated circuit devices. In K. L. Mittal (Ed.), Particles on Surfaces 1 (pp. 69-76). New York [u.a.]: Plenum Pr.

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Mittal_1988_ParticlesSurfaces1_69.pdf (Any fulltext), 577KB
 
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 Creators:
Weimer, J.J., Author
Kokosinski, J., Author
Cook, M.R., Author
Grunze, M.1, Author           
Affiliations:
1Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society, ou_2364731              

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Language(s): eng - English
 Dates: 1988
 Publication Status: Published in print
 Pages: 8
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: -
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Title: Particles on Surfaces 1
Source Genre: Book
 Creator(s):
Mittal, K. L., Editor
Affiliations:
-
Publ. Info: New York [u.a.] : Plenum Pr
Pages: IX, 384 Volume / Issue: - Sequence Number: - Start / End Page: 69 - 76 Identifier: ISBN: 0-306-43030-4