Chemical nanolithography with electron beams

Gölzhäuser, Armin; Eck, Wolfgang; Geyer, Wolfgang; Stadler, Volker; Weimann, Thomas; Hinze, Peter; Grunze, Michael

doi:10.1002/1521-4095(200106)13:11%3C803::AID-ADMA806%3E3.0.CO;2-W

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Chemical nanolithography with electron beams

Gölzhäuser, A., Eck, W., Geyer, W., Stadler, V., Weimann, T., Hinze, P., et al. (2001). Chemical nanolithography with electron beams. Advanced Materials, 13(11), 803-806. doi:10.1002/1521-4095(200106)13:11%3C803:AID-ADMA806%3E3.0.CO;2-W.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0001-BDE6-7 Version Permalink: https://hdl.handle.net/21.11116/0000-0001-BDE7-6

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https://onlinelibrary.wiley.com/doi/epdf/10.1002/1521-4095%28200106%2913%3A11%3C803%3A%3AAID-ADMA806%3E3.0.CO%3B2-W (Any fulltext) Open Access status unknown

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Creators:
Gölzhäuser, Armin, Author
Eck, Wolfgang, Author
Geyer, Wolfgang, Author
Stadler, Volker, Author
Weimann, Thomas, Author
Hinze, Peter, Author
Grunze, Michael¹, Author

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1Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society, ou_2364731

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Abstract: A highly focused electron beam as the agent for spatially selective reductionof nitro groups to amino groups in a self‐assembled monolayer of aromatics is the key feature of a novel technique in chemical nanolithography presented here. Treatment of the reactive amino groups with different reactants after each e‐beam writing step yields a surface with a defined array of chemically diverse structures; for example, see the line pattern in the Figure.

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Language(s): eng - English

Dates: Modified: 2001-02-01Submitted: 2000-10-19Date issued: 2001-06-01

Publication Status: Issued

Pages: 4

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Rev. Type: Peer

Identifiers: DOI: 10.1002/1521-4095(200106)13:11%3C803::AID-ADMA806%3E3.0.CO;2-W

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Title: Advanced Materials

Other : Adv. Mater.

Source Genre: Journal

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Publ. Info: Weinheim : Wiley-VCH

Pages: - Volume / Issue: 13 (11) Sequence Number: - Start / End Page: 803 - 806 Identifier: ISSN: 0935-9648
CoNE: https://pure.mpg.de/cone/journals/resource/954925570855