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  Electron induced chemical nanolithography with self-assembled monolayers

Geyer, W., Stadler, V., Eck, W., Gölzhäuser, A., Grunze, M., Sauer, M., et al. (2001). Electron induced chemical nanolithography with self-assembled monolayers. Journal of Vacuum Science and Technology B, 19(6), 2732-2735. doi:10.1116/1.1421560.

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JVacuumSciTechnolB _19_2001_2732.pdf (Any fulltext), 455KB
 
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Geyer, W., Author
Stadler, V., Author
Eck, W., Author
Gölzhäuser, A., Author
Grunze, M.1, Author           
Sauer, M., Author
Weimann, T., Author
Hinze, P., Author
Affiliations:
1Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society, ou_2364731              

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 Abstract: We demonstrate a simple scheme to generate chemical surface nanostructures. Electron-beam writing is used to locally modify the terminal nitro functionality in self-assembled monolayers of 4′-nitro-1,1′-biphenyl-4-thiol to amino groups, while the underlying aromatic layer is dehydrogenated and cross linked. Using low energy electron proximity printing and conventional electron-beam lithography with a beam energy of 2.5 keV and doses from 2500 to 50 000 μC/cm2, templates of reactive amino sites with lateral dimensions down to ∼20 nm could be fabricated. The templates were used for the surface immobilization of fluorinated carboxylic acid anhydrides and rhodamine dyes. The molecular structures were then imaged and analyzed by atomic force and scanning confocal fluorescence microscopy.

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Language(s): eng - English
 Dates: 2001-06-012001-10-082001-12-142001
 Publication Status: Issued
 Pages: 4
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1116/1.1421560
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Title: Journal of Vacuum Science and Technology B
  Other : JVST B
  Other : J. Vac. Sci. Techn. B
Source Genre: Journal
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Publ. Info: New York : Published by AVS through the American Institute of Physics
Pages: - Volume / Issue: 19 (6) Sequence Number: - Start / End Page: 2732 - 2735 Identifier: ISSN: 0734-2101
CoNE: https://pure.mpg.de/cone/journals/resource/954928495416