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  Fabrication and characterization of a focused ion beam milled lanthanum hexaboride based cold field electron emitter source

Singh, G., Bücker, R., Kassier, G., Barthelmess, M., Zheng, F., Migunov, V., et al. (2018). Fabrication and characterization of a focused ion beam milled lanthanum hexaboride based cold field electron emitter source. Applied Physics Letters, 113(9): 093101. doi:10.1063/1.5039441.

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Item Permalink: http://hdl.handle.net/21.11116/0000-0002-19D2-5 Version Permalink: http://hdl.handle.net/21.11116/0000-0004-93B9-5
Genre: Journal Article

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https://dx.doi.org/10.1063/1.5039441 (Publisher version)
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 Creators:
Singh, G.1, Author              
Bücker, R.1, Author              
Kassier, G.1, Author              
Barthelmess, M.2, Author
Zheng, F.3, Author
Migunov, V.3, 4, Author
Kruth, M.3, Author
Dunin-Borkowski, R. E.3, Author
Purcell, S. T.5, Author
Miller, R. J. D.1, 6, Author              
Affiliations:
1Miller Group, Atomically Resolved Dynamics Department, Max Planck Institute for the Structure and Dynamics of Matter, Max Planck Society, ou_1938288              
2Center for Free Electron Laser Science, DESY, ou_persistent22              
3Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter Grünberg Institute, Forschungszentrum Jülich, ou_persistent22              
4Central Facility for Electron Microscopy, RWTH Aachen University, ou_persistent22              
5Institute Lumière Matière, Université Claude Bernard Lyon 1 et CNRS, ou_persistent22              
6Department of Chemistry and Physics, University of Toronto, ou_persistent22              

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 Abstract: We report on a method of fabricating lanthanum hexaboride (LaB6) cold field emission tips with sub-100-nm apices by using a combination of electrochemical etching and focused ion beam milling. The primary advantage of combining the two methods is rapid fabrication while maintaining reproducibility. The LaB6 tips have low work functions and high mechanical stabilities and are chemically inert to residual gases. Field emission characterization was performed on three tips, with apex sizes of 15, 85, and 80 nm yielding 10 nA cold field emission currents at 0.76, 3.9, and 3.6 kV extraction potentials, respectively. All three tips showed excellent emission current stability for periods exceeding 30 min in a 5 × 10−9 mbar vacuum.

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Language(s): eng - English
 Dates: 2018-05-082018-08-012018-08-272018-08-27
 Publication Status: Published in print
 Pages: -
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 Rev. Method: Peer
 Identifiers: DOI: 10.1063/1.5039441
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Title: Applied Physics Letters
  Abbreviation : Appl. Phys. Lett.
Source Genre: Journal
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Publ. Info: Melville, NY : American Institute of Physics
Pages: - Volume / Issue: 113 (9) Sequence Number: 093101 Start / End Page: - Identifier: Other: 0003-6951
CoNE: /journals/resource/954922836223