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  Velocity distribution of titanium neutrals in the target region of high power impulse magnetron sputtering discharges

Held, J., Hecimovic, A., Keudell, A. v., & Schulz von der Gathen, V. (2018). Velocity distribution of titanium neutrals in the target region of high power impulse magnetron sputtering discharges. Plasma Sources Science and Technology, 27: 105012. doi:10.1088/1361-6595/aae236.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0002-6F18-8 Version Permalink: https://hdl.handle.net/21.11116/0000-0002-831E-9
Genre: Journal Article

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https://doi.org/10.1088/1361-6595/aae236 (Publisher version)
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 Creators:
Held, J.1, Author
Hecimovic, A.1, 2, Author           
Keudell, A. von1, Author
Schulz von der Gathen, V.1, Author
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1External Organizations, ou_persistent22              
2ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856290              

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Language(s): eng - English
 Dates: 2018
 Publication Status: Issued
 Pages: 15 p.
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 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1088/1361-6595/aae236
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Title: Plasma Sources Science and Technology
Source Genre: Journal
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Publ. Info: Bristol : IOP Publishing
Pages: - Volume / Issue: 27 Sequence Number: 105012 Start / End Page: - Identifier: ISSN: 0963-0252
CoNE: https://pure.mpg.de/cone/journals/resource/954925580133