Engulfment control of platinum nanoparticles into oxidized silicon substrates 
for fabrication of dense solid-state nanopore arrays

Le-The, Hai; Tregouet, Corentin; Kappl, Michael; Müller, Maren; Kirchhoff, Kathrin; Lohse, Detlef; van den Berg, Albert; Odijk, Mathieu; Eijkel, Jan C. T.

doi:10.1088/1361-6528/aaf114

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Engulfment control of platinum nanoparticles into oxidized silicon substrates for fabrication of dense solid-state nanopore arrays

Le-The, H., Tregouet, C., Kappl, M., Müller, M., Kirchhoff, K., Lohse, D., et al. (2019). Engulfment control of platinum nanoparticles into oxidized silicon substrates for fabrication of dense solid-state nanopore arrays. Nanotechnology, 30(6): 065301. doi:10.1088/1361-6528/aaf114.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0002-BC59-7 Version Permalink: https://hdl.handle.net/21.11116/0000-0002-BC5A-6

Genre: Journal Article

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Creators:
Le-The, Hai¹, Author
Tregouet, Corentin^{1, 2}, Author
Kappl, Michael³, Author
Müller, Maren³, Author
Kirchhoff, Kathrin⁴, Author
Lohse, Detlef², Author
van den Berg, Albert¹, Author
Odijk, Mathieu¹, Author
Eijkel, Jan C. T.¹, Author

Affiliations:
1 Univ Twente, BIOS Lab Chip Grp, MESA Inst Nanotechnol, Max Planck Ctr Complex Fluid Dynam, Enschede, Netherlands, ou_persistent22
2Univ Twente, Phys Fluids Grp, MESA Inst Nanotechnol, Max Planck Ctr Complex Fluid Dynam, Enschede, Netherlands, ou_persistent22
3Dept. Butt: Physics at Interfaces, MPI for Polymer Research, Max Planck Society, ou_1800286
4Dept. Landfester: Physical Chemistry of Polymers, MPI for Polymer Research, Max Planck Society, ou_1800288

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Language(s): eng - English

Dates: Published Online: 2019Date issued: 2019

Publication Status: Issued

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Identifiers: DOI: 10.1088/1361-6528/aaf114

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Title: Nanotechnology

Source Genre: Journal

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Publ. Info: Bristol, UK : IOP Pub.

Pages: - Volume / Issue: 30 (6) Sequence Number: 065301 Start / End Page: - Identifier: ISSN: 0957-4484
CoNE: https://pure.mpg.de/cone/journals/resource/954925577042