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  Spin crossover materials for MEMS actuation: Film integration and characterization

Manrique-Juarez, M., Rat, S., Mazenq, L., Mathieu, F., Seguy, I., Leichle, T., et al. (2017). Spin crossover materials for MEMS actuation: Film integration and characterization. In 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (pp. 1300-1303). IEEE Xplore Digital Library.

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 Creators:
Manrique-Juarez, M.D.1, Author
Rat, S.1, Author              
Mazenq, L., Author
Mathieu, F., Author
Seguy, I., Author
Leichle, T., Author
Nicu, L., Author
Salmon, L., Author
Molnar, G., Author
Bousseksou, A., Author
Affiliations:
1External Organizations, ou_persistent22              

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Free keywords: Actuators; Characterization; Deposition; Elastic moduli; Integration; Microelectromechanical devices; Microsystems; Residual stresses; Silicon compounds; Thin films; Transducers, Analytical method; Future applications; Mechanical parameters; MEMS resonators; Molecular spins; Resonance frequencies; Spin crossover materials; Spin crossovers, Solid-state sensors
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 Dates: 2017
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: DOI: 10.1109/TRANSDUCERS.2017.7994294
BibTex Citekey: Manrique-Juarez20171300
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Title: 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Place of Event: Kaohsiung, Taiwan
Start-/End Date: 2017-06-18 - 2017-06-22

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Title: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Source Genre: Proceedings
 Creator(s):
Affiliations:
Publ. Info: IEEE Xplore Digital Library
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 1300 - 1303 Identifier: ISSN: 2167-0021