English
 
Help Privacy Policy Disclaimer
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT
 
 
DownloadE-Mail
 Local TagsRelease HistoryDetailsSummary
  Spin crossover materials for MEMS actuation: Film integration and characterization

Manrique-Juarez, M., Rat, S., Mazenq, L., Mathieu, F., Seguy, I., Leichle, T., et al. (2017). Spin crossover materials for MEMS actuation: Film integration and characterization. In 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (pp. 1300-1303). IEEE Xplore Digital Library.

Item is

 

show all hide all

Basic

show hide
Item Permalink: https://hdl.handle.net/21.11116/0000-0004-F5A5-D Version Permalink: https://hdl.handle.net/21.11116/0000-0004-F5A6-C
Genre: Conference Paper

Files

show Files

Locators

show

Creators

show
hide
 Creators:
Manrique-Juarez, M.D.1, Author
Rat, S.1, Author           
Mazenq, L., Author
Mathieu, F., Author
Seguy, I., Author
Leichle, T., Author
Nicu, L., Author
Salmon, L., Author
Molnar, G., Author
Bousseksou, A., Author
Affiliations:
1External Organizations, ou_persistent22              

Content

show
hide
Free keywords: Actuators; Characterization; Deposition; Elastic moduli; Integration; Microelectromechanical devices; Microsystems; Residual stresses; Silicon compounds; Thin films; Transducers, Analytical method; Future applications; Mechanical parameters; MEMS resonators; Molecular spins; Resonance frequencies; Spin crossover materials; Spin crossovers, Solid-state sensors
 Abstract: -

Details

show
hide
Language(s):
 Dates: 2017
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: DOI: 10.1109/TRANSDUCERS.2017.7994294
BibTex Citekey: Manrique-Juarez20171300
 Degree: -

Event

show
hide
Title: 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Place of Event: Kaohsiung, Taiwan
Start-/End Date: 2017-06-18 - 2017-06-22

Legal Case

show

Project information

show

Source 1

show
hide
Title: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Source Genre: Proceedings
 Creator(s):
Affiliations:
Publ. Info: IEEE Xplore Digital Library
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 1300 - 1303 Identifier: ISSN: 2167-0021