Velocity distribution of titanium neutrals in the target region of high power 
impulse magnetron sputtering discharges

Held, J.; Hecimovic, A.; Keudell, A. von; Schulz von der Gathen, V.

Local TagsRelease HistoryDetailsSummary

Velocity distribution of titanium neutrals in the target region of high power impulse magnetron sputtering discharges

Held, J., Hecimovic, A., Keudell, A. v., & Schulz von der Gathen, V. (2019). Velocity distribution of titanium neutrals in the target region of high power impulse magnetron sputtering discharges. Talk presented at DPG-Frühjahrstagung 2019 der Sektion Materie und Kosmos (SMuK). München. 2019-03-17 - 2019-03-22.

Item is Released

show all hide all

Basic

show hide

Item Permalink: https://hdl.handle.net/21.11116/0000-0003-23EE-A Version Permalink: https://hdl.handle.net/21.11116/0000-0003-23EF-9

Genre: Talk

Files

show Files

Locators

show

Creators

show

hide

Creators:
Held, J.¹, Author
Hecimovic, A.², Author
Keudell, A. von¹, Author
Schulz von der Gathen, V.¹, Author

Affiliations:
1External Organizations, ou_persistent22
2ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856290

Content

show

Details

show

hide

Language(s): eng - English

Dates: Created: 2019

Publication Status: Not specified

Pages: -

Publishing info: -

Table of Contents: -

Rev. Type: -

Identifiers: -

Degree: -

Event

show

hide

Title: DPG-Frühjahrstagung 2019 der Sektion Materie und Kosmos (SMuK)

Place of Event: München

Start-/End Date: 2019-03-17 - 2019-03-22

Legal Case

show

Project information

show

Source 1

show

hide

Title: Verhandlungen der Deutschen Physikalischen Gesellschaft

Other : Verhandl. DPG

Source Genre: Journal

Creator(s):

Affiliations:

Publ. Info: Bad Honnef : DPG

Pages: - Volume / Issue: (VI) 54 (2) Sequence Number: P 16.1 Start / End Page: - Identifier: CoNE: https://pure.mpg.de/cone/journals/resource/04200195