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  Towards fully integrated photonic displacement sensors

Bag, A., Neugebauer, M., Mick, U., Christiansen, S., Schulz, S. A., Banzer, P., et al. (2020). Towards fully integrated photonic displacement sensors. Nature Communications, 11: 2915. doi:10.1038/s41467-020-16739-y.

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Item Permalink: http://hdl.handle.net/21.11116/0000-0004-B6AE-B Version Permalink: http://hdl.handle.net/21.11116/0000-0006-8AE3-E
Genre: Journal Article

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Towards fully integrated photonic displacement sensors.pdf (Preprint), 10MB
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 Creators:
Bag, Ankan1, 2, Author              
Neugebauer, Martin1, 2, Author              
Mick, Uwe1, 2, Author              
Christiansen, Silke3, 4, Author              
Schulz, Sebastian A 5, Author
Banzer, Peter2, Author              
Banzer, Peter1, 2, Author              
Affiliations:
1Interference Microscopy and Nanooptics, Emeritus Group Leuchs, Emeritus Groups, Max Planck Institute for the Science of Light, Max Planck Society, ou_2364700              
2Institute of Optics, Information and Photonics, Department of Physics, Friedrich-Alexander-University Erlangen-Nuremberg, Staudtstr. 7/B2, D-91058 Erlangen, Germany, ou_persistent22              
3Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, D-14109 Berlin, Germany, ou_persistent22              
4Physics Department, Freie Universitt Berlin, Arnimallee 14, D-14195 Berlin, Germany, ou_persistent22              
5SUPA, School of Physics and Astronomy, University of St Andrews, St Andrews, Scotland, UK, ou_persistent22              

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Free keywords: optical metrology, on-chip integration, Huygens dipoles, integrated displacement sensor, photonic crystal waveguide
 Abstract: The field of optical metrology with its high precision position, rotation and wavefront sensors represents the basis for lithography and high resolution microscopy. However, the on-chip integration - a task highly relevant for future nanotechnological devices - necessitates the reduction of the spatial footprint of sensing schemes by the deployment of novel concepts. A promising route towards this goal is predicated on the controllable directional emission of the fundamentally smallest emitters of light, i.e. dipoles, as an indicator. Here we realize an integrated displacement sensor based on the directional emission of Huygens dipoles excited in an individual dipolar antenna. The position of the antenna relative to the excitation field determines its directional coupling into a six-way crossing of photonic crystal waveguides. In our experimental study supported by theoretical calculations, we demonstrate the first prototype of an integrated displacement sensor with a standard deviation of the position accuracy below λ/300 at room temperature and ambient conditions.

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Language(s): eng - English
 Dates: 2020-06-09
 Publication Status: Published online
 Pages: -
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 Table of Contents: -
 Rev. Type: -
 Identifiers: arXiv: 1909.04478v1
DOI: 10.1038/s41467-020-16739-y
 Degree: -

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Title: Nature Communications
  Abbreviation : Nat. Commun.
Source Genre: Journal
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Publ. Info: London : Nature Publishing Group
Pages: - Volume / Issue: 11 Sequence Number: 2915 Start / End Page: - Identifier: ISSN: 2041-1723
CoNE: https://pure.mpg.de/cone/journals/resource/2041-1723