English
 
User Manual Privacy Policy Disclaimer Contact us
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT
 
 
DownloadE-Mail
  Creation of 3D microsculptures in PMMA by multiple angle proton irradiation

Andrea, T., Rothermel, M., Reinert, T., Koal, T., & Butz, T. (2011). Creation of 3D microsculptures in PMMA by multiple angle proton irradiation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 269(20), 2431-2434. doi:10.1142/S0129083512400244.

Item is

Basic

show hide
Item Permalink: http://hdl.handle.net/21.11116/0000-0004-CE0E-6 Version Permalink: http://hdl.handle.net/21.11116/0000-0004-CE0F-5
Genre: Journal Article

Files

show Files

Locators

show

Creators

show
hide
 Creators:
Andrea, T.1, Author
Rothermel, M.1, Author
Reinert, Tilo1, 2, Author              
Koal, T.1, Author
Butz, T.1, Author
Affiliations:
1Institute for Experimental Physics II, Nuclear Solid State Physics, Faculty of Physics and Geosciences, University of Leipzig, Germany, ou_persistent22              
2Department of Physics, University of North Texas, Denton, TX , ou_persistent22              

Content

show
hide
Free keywords: Proton beam writing; PMMA; Tomography
 Abstract: In recent years the technique of proton beam writing has established itself as a versatile method for the creation of microstructures in resist materials. While these structures can be almost arbitrary in two dimensions, the creation of genuine 3D structures remains a challenge. At the LIPSION accelerator facility a new approach has been developed which combines aspects of ion beam tomography, so far solely an analysis method, with proton beam writing. Key element is the targeted irradiation from multiple angles in order to obtain a much broader range of 3D microstructures than has hitherto been possible. PMMA columns with a diameter of ∼90 μm were used as raw material and placed in an upright position on top of a rotational axis. Using 2.25 MeV protons patterns corresponding to the silhouettes of the desired structures were written from two or more directions. In a subsequent step of chemical etching irradiated portions were dissolved, leaving behind the finished 3D sculpture. Various objects have been created. For the demonstration of the method a 70 μm high model of the Eiffel tower has been sculpted by irradiation from two angles. Using irradiation from three angles a 40 μm wide screw with right-handed thread could be crafted which might find applications in micromachining. Also, a cage structure with a pore size of ca. 20 μm was written with the intention to use it as a scaffold for the growth of biological cells.

Details

show
hide
Language(s): eng - English
 Dates: 2011-02-272011-10-15
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: DOI: 10.1142/S0129083512400244
BibTex Citekey: Andrea:2011
 Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show
hide
Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  Abbreviation : NIM B
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: Amsterdam : Elsevier B.V.
Pages: - Volume / Issue: 269 (20) Sequence Number: - Start / End Page: 2431 - 2434 Identifier: ISSN: 0168-583X
CoNE: https://pure.mpg.de/cone/journals/resource/954925484704